Integrated circuits having protruding interconnect conductors

ABSTRACT

Examples of an integrated circuit with an interconnect structure and a method for forming the integrated circuit are provided herein. In some examples, the method includes receiving a workpiece that includes an inter-level dielectric layer. A first contact that includes a fill material is formed that extends through the inter-level dielectric layer. The inter-level dielectric layer is recessed such that the fill material extends above a top surface of the inter-level dielectric layer. An etch-stop layer is formed on the inter-level dielectric layer such that the fill material of the first contact extends into the etch-stop layer. A second contact is formed extending through the etch-stop layer to couple to the first contact. In some such examples, the second contact physically contacts a top surface and a side surface of the first contact.

PRIORITY DATA

The present application is a divisional application of U.S. patentapplication Ser. No. 16/280,433, filed on Feb. 20, 2019, which claimsthe benefit of U.S. Provisional Application No. 62/751,935, entitled“Integrated Circuits Having Protruding Interconnect Conductors,” filedOct. 29, 2018, each of which herein incorporated by reference in itsentirety.

BACKGROUND

The semiconductor integrated circuit (IC) industry has experienced rapidgrowth. In the course of IC evolution, functional density (i.e., thenumber of interconnected devices per chip area) has generally increasedwhile geometry size (i.e., the smallest component (or line) that can becreated using a fabrication process) has decreased. This scaling downprocess generally provides benefits by increasing production efficiencyand lowering associated costs. However, such scaling down has also beenaccompanied by increased complexity in design and manufacturing ofdevices incorporating these ICs. Parallel advances in manufacturing haveallowed increasingly complex designs to be fabricated with precision andreliability.

Advances have been made to device fabrication as well as to thefabrication of the network of conductors that couple them. In thatregard, an integrated circuit may include an interconnect structure toelectrically couple the circuit devices (e.g., Fin-like Field EffectTransistors (FinFETs), planar FETs, memory devices, Bipolar-JunctionTransistors (BJTs), Light-Emitting Diodes (LEDs), other active and/orpassive devices, etc.). The interconnect structure may include anynumber of dielectric layers stacked vertically with conductive linesrunning horizontally within the layers. Vias may extend vertically toconnect conductive lines in one layer with conductive lines in anadjacent layer. Similarly, contacts may extend vertically between theconductive lines and substrate-level features. Together, the lines,vias, and contacts carry signals, power, and ground between the devicesand allow them to operate as a circuit.

BRIEF DESCRIPTION OF THE DRAWINGS

The present disclosure is best understood from the following detaileddescription when read with the accompanying figures. It is emphasizedthat, in accordance with the standard practice in the industry, variousfeatures are not drawn to scale and are used for illustration purposesonly. In fact, the dimensions of the various features may be arbitrarilyincreased or reduced for clarity of discussion.

FIGS. 1A and 1B are flow diagrams of a method of fabricating a workpiecewith an interconnect structure according to various aspects of thepresent disclosure.

FIG. 2 is a perspective illustration of the workpiece undergoing amethod of fabrication according to various aspects of the presentdisclosure.

FIGS. 3-17 are cross-sectional illustrations of the workpiece taken in afin-length direction that cut through a fin according to various aspectsof the present disclosure.

FIG. 18 is a cross-sectional illustration of a workpiece having a degreeof overlay error taken in a fin-length direction that cuts through a finaccording to various aspects of the present disclosure.

DETAILED DESCRIPTION

The following disclosure provides many different embodiments, orexamples, for implementing different features of the disclosure.Specific examples of components and arrangements are described below tosimplify the present disclosure. These are, of course, merely examplesand are not intended to be limiting. For example, the formation of afirst feature over or on a second feature in the description thatfollows may include embodiments in which the first and second featuresare formed in direct contact, and may also include embodiments in whichadditional features may be formed between the first and second features,such that the first and second features may not be in direct contact.Moreover, the formation of a feature connected to and/or coupled toanother feature in the present disclosure that follows may includeembodiments in which the features are formed in direct contact, and mayalso include embodiments in which additional features may be formedinterposing the features, such that the features may not be in directcontact.

In addition, spatially relative terms, for example, “lower,” “upper,”“horizontal,” “vertical,” “above,” “over,” “below,” “beneath,” “up,”“down,” “top,” “bottom,” etc. as well as derivatives thereof (e.g.,“horizontally,” “downwardly,” “upwardly,” etc.) are used for ease of thepresent disclosure of one features relationship to another feature. Thespatially relative terms are intended to cover different orientations ofthe device including the features. In addition, the present disclosuremay repeat reference numerals and/or letters in the various examples.This repetition is for the purpose of simplicity and clarity and doesnot in itself dictate a relationship between the various embodimentsand/or configurations beyond the extent noted.

Integrated circuits include an ever-increasing number of active andpassive circuit devices formed on a substrate or wafer with a complexinterconnect structure disposed on top to electrically couple thedevices. While there have been significant advances in fabrication andin miniaturizing the devices, the interconnect has generally resistedefforts to shrink it. As merely one issue, some interconnect featurescouple to other features on other layers, and smaller features mayprovide smaller landing areas for coupling to features on other layers.Accordingly, smaller features may have smaller tolerances for overlayerrors between layers. Furthermore, because resistance depends on thecross-sectional area of a conductor, not only do smaller features havegreater resistance, but the smaller contact areas may also increaseinterlayer resistance.

Some examples of the present technique address these issues and othersby forming conductive interconnect features that extend through andabove a dielectric interconnect material. This may provide a largercontact area because an upper level conductive feature may extend pastthe top surface of lower-level conductive feature to couple to the sidesurface as well as the top surface. The larger contact area may reducethe interlayer resistance and may also provide a reliable electricalconnection despite overlay errors. A liner may also be pulled back fromthe side surface of the lower-level conductive feature to further reducethe resistance at this interface. In some examples, the improvedinterface allows for even smaller conductive features to be formedreliably. It is noted that these advantages are merely examples, and noparticular advantage is required for any particular embodiment.

The present disclosure provides examples of an integrated circuit thatincludes an interconnect structure. Examples of the circuit and atechnique for forming the circuit are described with reference to FIGS.1A-17 . In that regard, FIGS. 1A and 1B are flow diagrams of a method100 of fabricating a workpiece 200 with an interconnect structureaccording to various aspects of the present disclosure. Additional stepscan be provided before, during, and after the method 100, and some ofthe steps described can be replaced or eliminated for other embodimentsof the method 100. FIG. 2 is a perspective illustration of the workpiece200 undergoing the method 100 of fabrication according to variousaspects of the present disclosure. FIGS. 3-17 are cross-sectionalillustrations of the workpiece 200 taken in a fin-length direction thatcut through a fin, as indicated by plane 202, according to variousaspects of the present disclosure.

Referring to block 102 of FIG. 1A and to FIG. 2 , a workpiece 200 isreceived that includes one or more circuit devices such as planar FieldEffect Transistors (FETs), Fin-like FETs (FinFETs), memory devices,bipolar-junction transistors, light-emitting diodes LEDs, other activeand/or passive devices, etc. In the example of FIG. 2 , the workpiece200 includes FinFETs, although the technique is equally suitable forplanar FETs, vertical FETs, and/or any other suitable type andconfiguration of circuit device.

The workpiece 200 includes a substrate 204 upon which the circuitdevice(s) are formed. In various examples, the substrate 204 includes anelementary (single element) semiconductor, such as silicon or germaniumin a crystalline structure; a compound semiconductor, such as siliconcarbide, gallium arsenic, gallium phosphide, indium phosphide, indiumarsenide, and/or indium antimonide; an alloy semiconductor such as SiGe,GaAsP, AlInAs, AlGaAs, GalnAs, GaInP, and/or GaInAsP; anon-semiconductor material, such as soda-lime glass, fused silica, fusedquartz, and/or calcium fluoride (CaF₂); and/or combinations thereof.

The substrate 204 may be uniform in composition or may include variouslayers, some of which may be selectively etched to form the fins. Thelayers may have similar or different compositions, and in variousembodiments, some substrate layers have non-uniform compositions toinduce device strain and thereby tune device performance. Examples oflayered substrates include silicon-on-insulator (SOI) substrates 204. Insome such examples, a layer of the substrate 204 may include aninsulator such as a semiconductor oxide, a semiconductor nitride, asemiconductor oxynitride, a semiconductor carbide, and/or other suitableinsulator materials.

Doped regions, such as wells, may be formed on the substrate 204. Inthat regard, some portions of the substrate 204 may be doped with p-typedopants, such as boron, BF₂, or indium while other portions of thesubstrate 204 may be doped with n-type dopants, such as phosphorus orarsenic; and/or other suitable dopants including combinations thereof.

In some examples, the devices on the substrate 204 extend out of thesubstrate 204. For example, FinFETs and/or other non-planar devices maybe formed on device fins 206 disposed on the substrate 204. The devicefins 206 are representative of any raised feature and include FinFETdevice fins 206 as well as fins 206 for forming other raised active andpassive devices upon the substrate 204. The fins 206 may be similar incomposition to the substrate 204 or may be different therefrom. Forexample, in some embodiments, the substrate 204 may include primarilysilicon, while the fins 206 include one or more layers that areprimarily germanium or a SiGe semiconductor. In some embodiments, thesubstrate 204 includes a SiGe semiconductor, and the fins 206 include aSiGe semiconductor with a different ratio of silicon to germanium thanthe substrate 204.

The fins 206 may be formed by etching portions of the substrate 204, bydepositing various layers on the substrate 204 and etching the layers,and/or by other suitable techniques. For example, the fins 206 may bepatterned using one or more photolithography processes, includingdouble-patterning or multi-patterning processes. Generally,double-patterning or multi-patterning processes combine photolithographyand self-aligned processes, allowing patterns to be created that have,for example, pitches smaller than what is otherwise obtainable using asingle, direct photolithography process. For example, in one embodiment,a sacrificial layer is formed over a substrate and patterned using aphotolithography process. Spacers are formed alongside the patternedsacrificial layer using a self-aligned process. The sacrificial layer isthen removed, and the remaining spacers may then be used to pattern thefins.

The fins 206 may be physically and electrically separated from eachother by isolation features 208, such as a shallow trench isolationfeatures (STIs). In various examples, the isolation features 208 includedielectric materials such as semiconductor oxides, semiconductornitrides, semiconductor carbides, FluoroSilicate Glass (FSG), low-kdielectric materials, and/or other suitable dielectric materials.

Each device fin 206 may include any number of circuit devices, such asFinFETs, that, in turn, each include a pair of opposing source/drainfeatures 210 separated by a channel region 212. The source/drainfeatures 210 may include a semiconductor (e.g., Si, Ge, SiGe, etc.) andone or more dopants, such as p-type dopants (e.g., boron, BF₂, orindium) or n-type dopants (e.g., phosphorus or arsenic). Similarly, thechannel region 212 may include a semiconductor and one or more dopantsof the opposite type of those of the source/drain features 210.

The flow of carriers (electrons for an n-channel FinFET and holes for ap-channel FinFET) through the channel region 212 is controlled by avoltage applied to a gate structure 214 adjacent to and overwrapping thechannel region 212. To avoid obscuring other elements, the gatestructures 214 are translucent in FIG. 2 .

Referring to FIG. 3 , a portion of the received workpiece 200 is shownin more detail. For example, the gate structure 214 is shown andincludes, in some examples, an interfacial layer 302 disposed on the topand side surfaces of the channel regions 212. The interfacial layer 302may include an interfacial material, such as a semiconductor oxide,semiconductor nitride, semiconductor oxynitride, other semiconductordielectrics, other suitable interfacial materials, and/or combinationsthereof.

The gate structure 214 may also include a gate dielectric 304 disposedon the interfacial layer 302. The gate dielectric 304 may also extendvertically along the sides of the gate structure 214. The gatedielectric 304 may include one or more dielectric materials, which arecommonly characterized by their dielectric constant relative to silicondioxide. In some embodiments, the gate dielectric 304 includes a high-kdielectric material, such as HfO₂, HfSiO, HfSiON, HfTaO, HfTiO, HfZrO,zirconium oxide, aluminum oxide, hafnium dioxide-alumina (HfO₂—Al₂O₃)alloy, other suitable high-k dielectric materials, and/or combinationsthereof. Additionally or in the alternative, the gate dielectric 304 mayinclude other dielectrics, such as a semiconductor oxide, semiconductornitride, semiconductor oxynitride, semiconductor carbide, amorphouscarbon, TEOS, other suitable dielectric material, and/or combinationsthereof. The gate dielectric 304 may be formed to any suitablethickness, and in some examples, the gate dielectric 304 has a thicknessof between about 0.1 nm and about 3 nm.

A gate electrode is disposed on the gate dielectric 304. The gateelectrode may include a number of different conductive layers, of whichthree exemplary types (a capping layer 306, work function layer(s) 308,and an electrode fill 310) are shown. With respect to the capping layer306, it may include any suitable conductive material including metals(e.g., W, Al, Ta, Ti, Ni, Cu, Co, etc.), metal nitrides, and/or metalsilicon nitrides. In various embodiments, the capping layer 306 includesTaSiN, TaN, and/or TiN.

The gate electrode may include one or more work function layers 308 onthe capping layer 306. Suitable work function layer 308 materialsinclude n-type and/or p-type work function materials based on the typeof device. Exemplary p-type work function metals include TiN, TaN, Ru,Mo, Al, WN, ZrSi₂, MoSi₂, TaSi₂, NiSi₂, WN, other suitable p-type workfunction materials, and/or combinations thereof. Exemplary n-type workfunction metals include Ti, Ag, TaAl, TaAlC, TiAlN, TaC, TaCN, TaSiN,Mn, Zr, other suitable n-type work function materials, and/orcombinations thereof.

The gate electrode may also include an electrode fill 310 on the workfunction layer(s) 308. The electrode fill 310 may include any suitablematerial including metals (e.g., W, Al, Ta, Ti, Ni, Cu, Co, etc.), metaloxides, metal nitrides, and/or combinations thereof, and in an example,the electrode fill 310 includes tungsten.

In some examples, the gate structure 214 includes a gate cap 312 on topof the gate dielectric 304, the capping layer 306, the work functionlayer(s) 308, and/or the electrode fill 310. The gate cap 312 mayinclude any suitable material, such as a dielectric material (e.g., asemiconductor oxide, a semiconductor nitride, a semiconductoroxynitride, a semiconductor carbide, a semiconductor oxycarbonitride,etc.), polysilicon, Spin On Glass (SOG), tetraethylorthosilicate (TEOS),Plasma Enhanced CVD oxide (PE-oxide), High-Aspect-Ratio-Process(HARP)-formed oxide, and/or other suitable material. In some examples,the gate cap 312 includes silicon oxycarbonitride. In some examples, thegate cap 312 has a thickness between about 1 nm and about 10 nm.

Sidewall spacers 314 are disposed on the side surfaces of the gatestructures 214. The sidewall spacers 314 may be used to offset thesource/drain features 210 and to control the source/drain junctionprofile. In various examples, the sidewall spacers 314 include one ormore layers of suitable materials, such as a dielectric material (e.g.,a semiconductor oxide, a semiconductor nitride, a semiconductoroxynitride, a semiconductor carbide, a semiconductor oxycarbonitride,etc.), SOG, TEOS, PE-oxide, HARP-formed oxide, and/or other suitablematerials. In one such embodiment, the sidewall spacers 314 each includea first layer of silicon oxide, a second layer of silicon nitridedisposed on the first layer, and a third layer of silicon oxide disposedon the second layer. In the embodiment, each layer of the sidewallspacers 314 has a thickness between about 1 nm and about 10 nm.

The workpiece 200 may also include a Bottom Contact Etch-Stop Layer(BCESL) 316 disposed on the source/drain features 210, on the gatestructures 214, and alongside the sidewall spacers 314. The BCESL 316may include a dielectric (e.g., a semiconductor oxide, a semiconductornitride, a semiconductor oxynitride, a semiconductor carbide, etc.)and/or other suitable material. As the BCESL 316 provides protectionfrom over etching during the etching of inter-level dielectric layers(described below), the composition of the BCESL 316 may be configured tohave a different etch selectivity than the inter-level dielectriclayers. In various embodiments, the BCESL 316 includes SiN, SiO, SiON,and/or SiC. The BCESL 316 may be formed to any suitable thickness, andin some examples, the BCESL 316 has a thickness between about 1 nm andabout 20 nm.

One or more Inter-Level Dielectric (ILD) layers (e.g., layers 318 and320) are disposed on the source/drain features 210 and gate structures214 of the workpiece 200. The ILD layers 318 and 320 act as insulatorsthat support and isolate conductive traces of an electrical multi-levelinterconnect structure. In turn, the multi-level interconnect structureelectrically interconnects elements of the workpiece 200, such as thesource/drain features 210 and the gate structures 214. The ILD layers318 and 320 may include a dielectric material (e.g., a semiconductoroxide, a semiconductor nitride, a semiconductor oxynitride, asemiconductor carbide, etc.), SOG, FSG, PhosphoSilicate Glass (PSG),BoroPhosphoSilicate Glass (BPSG), Black Diamond®, Xerogel, Aerogel,amorphous fluorinated carbon, parylene, BCB, SiLK®, and/or combinationsthereof.

Referring to block 104 of FIG. 1A and to FIG. 4 , the ILD layers 318 and320 are etched to form recesses 402 for source/drain contacts. Therecesses 402 expose the source/drain features 210 and 212 at locationswhere conductive features of the interconnect are to be formed. In somesuch examples, this includes forming a photoresist 404 on the workpiece200 and patterning the photoresist 404 in a photolithographic process toselectively expose portions of the ILD layers 318 and 320 to etch.

In one embodiment, a photolithographic system exposes the photoresist404 to radiation in a particular pattern determined by a mask. Lightpassing through or reflecting off the mask strikes the photoresist 404thereby transferring a pattern formed on the mask to the photoresist404. In other such embodiments, the photoresist 404 is exposed using adirect write or maskless lithographic technique, such as laserpatterning, e-beam patterning, and/or ion-beam patterning. Once exposed,the photoresist 404 is developed, leaving the exposed portions of theresist, or in alternative examples, leaving the unexposed portions ofthe resist. An exemplary patterning process includes soft baking of thephotoresist 404, mask aligning, exposure, post-exposure baking,developing the photoresist 404, rinsing, and drying (e.g., hard baking).

The portions of the ILD layers 318 and 320 exposed by the photoresist404 are then etched using any suitable etching technique such as wetetching, dry etching, RIE, and/or other etching methods. In someembodiments, the etching process includes dry etching using anoxygen-based etchant, a fluorine-based etchant (e.g., CF₄, SF₆, CH₂F₂,CHF₃, and/or C₂F₆), a chlorine-based etchant (e.g., Cl₂, CHCl₃, CCl₄,and/or BCl₃), a bromine-based etchant (e.g., HBr and/or CHBR₃), aniodine-based etchant, other suitable etchant gases or plasmas, and/orcombinations thereof. The etching of the ILD layers 318 and 320 may beconfigured to further remove the exposed portions of the BCESL 316 oradditional etching processes may be performed to open the BCESL 316.

The recesses 402 may have any suitable width, and in variousembodiments, the width 406 of the recess 402 at a reference point, suchas where the lower ILD layer 318 meets the upper ILD layer 320, isbetween about 15 nm and about 20 nm. The etching technique may beconfigured to produce recesses 402 with substantially verticalsidewalls. Conversely, in some embodiments, the etching technique may beconfigured to produce sidewalls that taper outward in a direction awayfrom the substrate 204 (i.e., angle 408 being less than 90°). Thetapered recesses 402 may reduce the occurrence of pinch-off, wheredeposition near the opening of a recess 402 seals the recess 402 beforeit is fully filled, and other adverse effects that may cause voidsduring the subsequent deposition processes that form the contacts. Insome such embodiments, angle 408 is greater than or equal to 85° andless than 90°.

The etching technique may be configured to etch the material(s) of theILD layers 318 and 320 and the BCESL 316 without significant etching ofthe surrounding materials. Additionally or in the alternative, in someexamples, the etching technique is configured to etch a portion of thesource/drain features 210 so that a contact formed in the recess willextend into the respective source/drain feature 210. The recesses 402may extend any depth into the source/drain features 210, and in someexamples, the recesses 402 extend between 1 nm and about 5 nm below thetop surface of the source/drain features as indicated by marker 410.

Any remaining photoresist 404 may be removed after etching the recesses402. For reference, the thickness 412 of the ILD layer 320 above the topof the BCESL 316 may be between about 50 nm and about 100 nm at theconclusion of block 104.

Referring to block 106 of FIG. 1A and to FIG. 5 , an additional etchingprocess is performed on the topmost portion of the upper ILD layer 320to round the corners of the recesses 402 and thereby widen the uppermostportions of the recesses 402. This may further reduce the likelihood ofpinch-off and rectify other causes of fill irregularities. The topmostportions of the upper ILD layer 320 may be etched using any suitableetching technique, such as wet etching, dry etching, RIE, and/or otheretching methods, and the etching technique may be configured to avoidsignificant etching of the surrounding materials, such as the lower ILDlayer 318, the source/drain features 210, and/or the BCESL 316. Theetching may reduce the thickness 412 of the upper ILD layer 320 abovethe top of the BCESL 316 by between about 5 nm and about 20 nm (e.g.,between about 10% and about 20%), and the thickness 412 of the ILD layer320 may be between about 40 nm and about 90 nm at the conclusion ofblock 106. In some such examples, the width 406 of the recess 402 at theinterface between the ILD layers 318 and 320 remains between about 15 nmand about 20 nm.

Referring to block 108 of FIG. 1A and to FIG. 6 , a dielectric contactliner 602 is deposited on the side surfaces of the recess 402. Thedielectric contact liner 602 may include a dielectric material (e.g., asemiconductor oxide, a semiconductor nitride, a semiconductoroxynitride, a semiconductor carbide, a semiconductor oxycarbonitride,etc.) and/or other suitable material. In some examples, the dielectriccontact liner 602 includes a semiconductor nitride (e.g., SiN).

The dielectric contact liner 602 may be deposited using Atomic LayerDeposition (ALD), Plasma Enhanced ALD (PEALD), Chemical Vapor Deposition(CVD), Plasma Enhanced CVD (PECVD), High-Density Plasma CVD (HDP-CVD),and/or other suitable deposition processes. The dielectric contact liner602 may be formed to any suitable thickness, and in various suchexamples, the dielectric contact liner 602 is formed by an ALD processto have a thickness between about 1 nm and about 5 nm.

Referring to block 110 of FIG. 1A and to FIG. 7 , the horizontalportions of the dielectric contact liner 602 are removed using adirectional etching technique. The etching may be configured so that thevertical portions of the dielectric contact liner 602 remain on the sidesurfaces of the ILD layers 318 and 320, the BCESL 316, and/or thesource/drain features 210. The horizontal portions of the dielectriccontact liner may be etched using any suitable etching techniqueincluding anisotropic dry etching, wet etching, RIE, and/or otheranisotropic etching techniques. In some embodiments, the etching processincludes high-density plasma dry etching using a combination of CH₃F,COS (carbonyl sulfide), and H₂.

The particular etching technique may be configured to avoid significantetching of the ILD layers 318 and 320 and the source/drain feature 210.However, in some examples, the thickness 412 of the ILD layer 320 abovethe BCESL 316 is reduced by between about 1 nm and about 5 nm.Accordingly, the thickness 412 of the ILD layer 320 may be between about40 nm and about 90 nm at the conclusion of block 110. In some suchexamples, the width 406 of the recess 402 at the interface of the ILDlayers 318 and 320 may be between about 10 nm and about 15 nm at the endof block 110.

Referring to block 112 of FIG. 1A, the workpiece 200 is cleaned prior toforming a conductive contact liner to remove native oxides and othercontaminants. The cleaning process may use any suitable wet cleaning ordry cleaning process, and in some examples, this includes a wet cleanwhere de-ionized water (DI), SC1 (DI, NH₄OH, and/or H₂O₂), SC2 (DI, HCl,and/or H₂O₂), ozonated de-ionized water (DIWO₃), SPM (H₂SO₄ and/orH₂O₂), SOM (H₂SO₄ and/or O₃), SPOM, H₃PO₄, dilute hydrofluoric acid(DHF), HF, HF/ethylene glycol (EG), HF/HNO₃, NH₄OH, tetramethylammoniumhydroxide (TMAH), etc. are applied to the workpiece 200 including withinthe recesses 402. The workpiece 200 and/or wet cleaning solution may beagitated using ultrasonic energy or any other technique to facilitatethe cleaning process. Likewise, heat may be applied to promote thecleaning.

The cleaning may reduce the thickness 412 of the ILD layer 320 above thetop of the BCESL 316 by between about 5 nm and about 20 nm (e.g.,between about 10% and about 20%), and the thickness 412 of the ILD layer320 may be between about 30 nm and about 80 nm at the conclusion ofblock 112.

Referring to block 114 of FIG. 1A and to FIG. 8 , a contact linerprecursor 802 is formed on the side and bottom surfaces of the recesses402. The contact liner precursor 802 may form a liner that promotesadhesion between a contact fill material and a remainder of theworkpiece 200. The contact liner precursor 802 may also act a barrierthat prevents material of the contact from diffusing into the workpiece200. In some examples, the contact liner precursor 802 also forms asilicide at an interface with the source/drain features 210.Accordingly, the contact liner precursor 802 may include any suitableconductive material including metals (e.g., Ti, Ta, Co, W, Al, Ni, Cu,Co, etc.), metal nitrides, metal silicon nitrides, and/or other suitablematerials. In one such embodiment, the contact liner precursor 802includes Ti.

The contact liner precursor 802 may be deposited using ALD, PEALD, CVD,PECVD, HDP-CVD, and/or other suitable deposition processes. The contactliner precursor 802 may be formed to any suitable thickness and, invarious examples, is formed by a CVD process to have a thickness betweenabout 1 nm and about 5 nm.

Referring to block 116 of FIG. 1A and to FIG. 9 , the workpiece 200 isannealed to convert the contact liner precursor 802 into a contact liner902. To do so, the annealing process may introduce nitrogen into thecontact liner precursor 802 from ambient N₂ and/or NH₃ present duringthe annealing. In an example, the annealing converts a contact linerprecursor 802 that is predominantly Ti into a contact liner 902 thatincludes TiN.

The annealing process may also cause a metal or other conductivematerial to diffuse from the contact liner precursor 802 into asource/drain feature 210 to form a silicide feature 904 between theremaining source/drain feature 210 and the contact liner 902. Thesilicide feature 904 may reduce the resistance at the interface betweenthe source/drain feature 210 and the contact liner 902. In one suchexample, the annealing causes titanium to diffuse from the contact linerprecursor 802 to form a silicide feature 904 that includes TiSi_(X). Thesilicide feature 904 may have any suitable thickness, and in someexamples is between about 1 nm and about 5 nm thick.

In various examples, the annealing process heats the workpiece 200 tobetween about 350° C. and about 500° C. for between about 30 seconds andabout 5 minutes in an environment containing N₂ and/or NH₃ to form thecontact liner 902 and the silicide feature 904.

Referring to block 118 of FIG. 1A and to FIG. 10 , a contact fill 1002is deposited on the workpiece 200 including on the contact liner 902within the recesses 402 to define source/drain contacts 1004 thatinclude the contact liner 902 and the contact fill 1002. The contactfill 1002 may be deposited by any suitable technique including ALD,PEALD, CVD, PE CVD, Physical Vapor Deposition (PVD), and/or combinationsthereof. The contact fill 1002 may include any suitable materialincluding metals (e.g., Co, W, Al, Ta, Ti, Ni, Cu, etc.), metal oxides,metal nitrides and/or combinations thereof, and in an example, thecontact fill 1002 includes cobalt.

Referring to block 120 of FIG. 1A and to FIG. 11 , a Chemical MechanicalPlanarization/Polishing (CMP) process may be performed following thedeposition of the contact fill 1002 to planarize the ILD layer 320, thedielectric contact liner 602, the contact liner 902, and the contactfill 1002. While CMP may tend to produce a substantially coplanar topsurface, in many examples, some materials, such as the contact fill1002, are recessed more than others. For example, reduced adhesionbetween the contact fill 1002 and the contact liner 902, grain size andgrain quality of the contact fill 1002, and/or other factors may causethe contact fill 1002 to be between about 1 nm and about 2 nm shorterthan the ILD layer 320, the dielectric contact liner 602, and/or thecontact liner 902 as indicated by marker 1102. For reference, thethickness 412 of the ILD layer 320 above the top of the BCESL 316 may bebetween about 20 nm and about 30 nm at the conclusion of block 120.

Referring to block 122 of FIG. 1B and to FIG. 12 , the ILD layer 320 maybe pulled back so that at least the contact fill 1002 of the contact1004 protrudes above the top surface of the ILD layer 320. Thisprotrusion may allow better coupling with subsequent conductive featuresby increasing the coupling area. However, the amount of protrusion maybe limited to avoid contact-to-contact leakage. In various examples, thecontact fill 1002 and optionally the contact liner 902 may protrudebetween about 1 nm and about 5 nm from the top of the ILD layer 320 asindicated by marker 1202.

The ILD layer 320 pull back may be performed using any suitable etchingtechnique including dry etching, wet etching, RIE, and or other suitableetching techniques. In an example, a radical species treatment isperformed that includes a dry etch using a mixture of H₂ and NF₃. Theratio of H₂ to NF₃ may be between about 25:1 and about 50:1, with someexamples having a ratio greater than 40:1. The radical species treatmentmay be performed at a temperature between about 10° C. and about 100° C.and a pressure between about 0.3 torr and about 2.0 torr. The ILD layer320 pull back may also pull back the dielectric contact liner 602 sothat the top surfaces of the ILD layer 320 and the dielectric contactliner 602 remain substantially coplanar without significant etching ofthe contact fill 1002 and contact liner 902.

The etching may reduce the thickness 412 of the ILD layer 320 above thetop of the BCESL 316 by between about 5 nm and about 10 nm (e.g.,between about 10% and about 30%), and the thickness 412 of the ILD layer320 may be between about 10 nm and about 20 nm at the conclusion ofblock 122.

Referring to block 124 of FIG. 1B and to FIG. 13 , the contact liner 902may be pulled back to be substantially coplanar with the ILD layer 320and/or the dielectric contact liner 602. This may be performedconcurrently with block 122 or in a separate process.

The contact liner 902 pull back may be performed using any suitableetching technique, including dry etching, wet etching, RIE, and or othersuitable etching techniques. In an example, wet etching is performedusing Ammonia Peroxide Mixture (APM) (NH₄OH, H₂O₂, and/or de-ionizedwater). A suitable ratio of NH₄OH to H₂O₂ to de-ionized water is about1:2:40, although other suitable ratios may be used. The wet etching maybe performed at a temperature between about 30° C. and about 50° C.

As explained above, because the top of the contact 1004 protrudes aboveILD layer 320, some of the side surfaces of the contact fill 1002 areexposed for coupling, which may improve the interface between contactswhen some degree of overlay error is present. This may allow theformation of smaller contacts. In some examples, the width of the topsurface of the contact fill 1002 is between about 10 nm and about 20 nm,and the additional exposed side surfaces allow reliable connection tosuch minute contacts 1004.

Referring to block 126 of FIG. 1B and to FIG. 14 , a Middle ContactEtch-Stop Layer (MCESL) 1402 is formed on the ILD layer 320 and on thecontact fill 1002. In particular, the contact fill 1002 may protrudeinto the MCESL 1402 and cause a mesa to form in the MCESL 1402 above thecontact fill 1002. In various examples, the contact fill 1002 extendsbetween about 1 nm and about 5 nm into the MCESL 1402.

The MCESL 1402 may include a dielectric (e.g., a semiconductor oxide, asemiconductor nitride, a semiconductor oxynitride, a semiconductorcarbide, etc.) and/or other suitable material, and in variousembodiments, the MCESL 1402 includes SiN, SiO, SiON, and/or SiC.

The MCESL 1402 may be deposited using ALD, PEALD, CVD, PECVD, HDP-CVD,and/or other suitable deposition processes. The MCESL 1402 may be formedto any suitable thickness, and in various such examples, the MCESL 1402is formed using CVD to a thickness between about 1 nm and about 20 nmwith the mesa protruding between about 1 nm and about 5 nm above theremainder of the MCESL 1402.

Referring to block 128 of FIG. 1B and referring still to FIG. 14 , athird ILD layer 1404 is formed on the MCESL 1402. The third ILD layer1404 may include a dielectric material (e.g., a semiconductor oxide, asemiconductor nitride, a semiconductor oxynitride, a semiconductorcarbide, etc.), SOG, FSG, PSG, BPSG, Black Diamond®, Xerogel, Aerogel,amorphous fluorinated carbon, parylene, BCB, SiLK®, and/or combinationsthereof.

The third ILD layer 1404 may be deposited using ALD, PEALD, CVD, PECVD,HDP-CVD, PVD, spin-on deposition, and/or other suitable depositionprocesses. The third ILD layer 1404 may be formed to any suitablethickness, and in various examples, the third ILD layer 1404 is betweenabout 50 nm and about 100 nm thick.

Referring to block 130 of FIG. 1B and to FIG. 15 , the ILD layers 320and 1404 are etched to form recesses 1502 for contacts that couple tothe gate and contacts that couple to the existing source/drain contacts.This may be performed substantially as described in block 104, and mayinclude one or more iterations of: forming a photoresist on theworkpiece 200, patterning the photoresist 404, and etching the exposedportions of the ILD layers 320 and 1404, the MCESL 1402, the BCESL 316,and/or the gate cap 312.

Any remaining photoresist may be removed after etching the recesses1502.

Referring to block 132 of FIG. 1B and to FIG. 16 , a contact liner 1602is formed on the side and bottom surfaces of the recesses 1502. This maybe performed substantially as described in blocks 114 and/or 116 and thecontact liner 1602 may be similar in composition to the contact liner902. In that regard, the contact liner 1602 may include metals (e.g.,Ti, Ta, Co, W, Al, Ni, Cu, Co, etc.), metal nitrides, metal siliconnitrides, and/or other suitable materials. In various embodiments, thecontact liner 1602 includes Ti and/or TiN.

Referring to block 134 of FIG. 1B and referring still to FIG. 16 , acontact fill 1604 is formed on the contact liner 1602 in the recesses1502 to define contacts 1606 that include the contact liner 1602 and thecontact fill 1604. This may be performed substantially as described inblock 118 and the contact fill 1604 may be similar in composition to thecontact fill 1002. In that regard, the contact fill 1604 may includemetals (e.g., W, Co, Al, Ta, Ti, Ni, Cu, etc.), metal oxides, metalnitrides and/or combinations thereof, and in an example, the contactfill 1604 includes tungsten.

Referring to block 136 of FIG. 1B and to FIG. 17 , a Chemical MechanicalPlanarization/Polishing (CMP) process may be performed following thedeposition of the contact fill 1604 to planarize the third ILD layer1404, the contact liner 1602, and the contact fill 1604.

Referring to block 138 of FIG. 1B, the workpiece 200 may be provided forfurther fabrication. In various examples, this includes forming aremainder of an electrical interconnect structure, dicing, packaging,and other fabrication processes.

The above examples illustrate the workpiece 200 with an ideal overlayarrangement between contacts 1004 and contacts 1606 so that the entiretyof the bottom surface of contact 1606 is in direct physical contact withthe topmost surface of contact 1004. Further examples showing conductiveinterconnect features with some degree of overlay misalignment areillustrated with respect to FIG. 18 . FIG. 18 is a cross-sectionalillustration of a workpiece 1800 taken in a fin-length direction thatcuts through a fin according to various aspects of the presentdisclosure.

Workpiece 1800 is substantially similar to workpiece 200 above, exceptas noted, and may be formed by method 100. In fact, in some examples,the workpiece 1800 is workpiece 200. The workpiece 1800 includes tworegions. The first region 1802 and the second region 1804 each include afirst interconnect feature 1806, such as the source/drain contact 1004above. In further examples, the first interconnect feature 1806 is a viaor other conductive interconnect feature. The first interconnect feature1806 includes a liner 1808 and a fill 1810, substantially similar thecontact liner 902 and contact fill 1002 above. The first interconnectfeature 1806 may also include a dielectric liner 1812 substantiallysimilar to the dielectric contact liner 602 above.

The first interconnect feature 1806 may be formed by method 100 andaccordingly, the fill 1810 extends above the top surface of an ILD layer1814 and into a MCESL 1816. In various such examples, the fill 1810 ofthe first interconnect feature 1806 extends between about 1 nm and about5 nm above the top surface of the ILD layer 1814 as indicated by marker1818.

The first region 1802 and the second region 1804 each further include asecond interconnect feature 1820 that extends through another ILD layer1814 and the MCESL 1816 to couple to the first interconnect feature1806. The second interconnect feature 1820 includes a liner 1822 and afill 1824, substantially similar to the contact liner 1602 and contactfill 1604 above.

In the first region 1802, the overlay arrangement of interconnectfeatures 1806 and 1820 is such that the entirety of the bottom surfaceof interconnect feature 1820 is in direct physical contact with thetopmost surface of interconnect feature 1806. However, the second region1804 illustrates some degree of overlay misalignment between thefeatures. Accordingly, a portion of interconnect feature 1820 physicallycontacts the topmost surface of interconnect feature 1806, while theremainder extends past the lower interconnect feature 1806. However,because the remaining portion of interconnect feature 1820 physicallycontacts a side surface of the lower interconnect feature 1806, areliable electrical connection is still made.

Thus, the present disclosure provides examples of an integrated circuitwith an interconnect structure and a method for forming the integratedcircuit. In some embodiments, a method of forming an integrated circuitdevice includes receiving a workpiece that includes an inter-leveldielectric layer. A first contact that includes a fill material isformed that extends through the inter-level dielectric layer. Theinter-level dielectric layer is recessed such that the fill materialextends above a top surface of the inter-level dielectric layer. Anetch-stop layer is formed on the inter-level dielectric layer such thatthe fill material of the first contact extends into the etch-stop layer.A second contact is formed extending through the etch-stop layer tocouple to the first contact. In some such embodiments, the secondcontact physically contacts a top surface and a side surface of thefirst contact. In some such embodiments, the first contact furtherincludes a liner and the fill material is disposed within the liner. Theliner is recessed such that the fill material extends above a topsurface of the liner. In some such embodiments, the workpiece includes asource/drain feature, and the forming of the first contact includesdepositing a liner precursor within a recess in the inter-leveldielectric layer and annealing the workpiece to form a liner and to forma silicide feature between the source/drain feature and the liner. Insome such embodiments, the inter-level dielectric layer extends above atop surface of the fill material prior to the recessing of theinter-level dielectric layer. In some such embodiments, the workpieceincludes a source/drain feature, and the forming of the first contactincludes forming a recess in the inter-level dielectric layer and in thesource/drain feature. In some such embodiments, the recess has a depthsuch that the fill material extends below a top surface of thesource/drain feature. In some such embodiments, the forming of the firstcontact further includes forming a dielectric liner on side surfaces ofthe recess. In some such embodiments, the dielectric liner extends intothe source/drain feature.

In further examples, a method includes receiving a workpiece thatincludes a source/drain feature and an inter-level dielectric layerdisposed on the source/drain feature. A first contact is formedextending through the inter-level dielectric layer to electricallycouple to the source/drain feature, and the inter-level dielectric layeris recessed such a top surface of the first contact is above a topsurface of the inter-level dielectric layer. A second contact is formedthat is coupled to the first contact. In some such embodiments, thesecond contact physically contacts a top surface and a side surface ofthe first contact. In some such embodiments, an etch-stop layer isformed on the inter-level dielectric layer and on the first contact. Thefirst contact extends into the etch-stop layer, and the second contactextends through the etch-stop layer to couple to the first contact. Insome such embodiments, the etch-stop layer includes a mesa disposed overthe first contact that extends above a remainder of the etch-stop layer.In some such embodiments, the first contact extends below a top surfaceof the source/drain feature. In some such embodiments, the forming ofthe first contact includes: depositing a liner precursor on theinter-level dielectric layer and on the source/drain feature andannealing the workpiece to form a liner and to form a silicide featurebetween the source/drain feature and the first contact. In some suchembodiments, the inter-level dielectric layer extends above a topsurface of the first contact prior to the recessing of the inter-leveldielectric layer.

In yet further embodiments, an integrated circuit device includes asubstrate, a dielectric layer disposed on the substrate, a first contactextending through the dielectric layer that extends above the dielectriclayer, and a second contact that physically contacts a top surface ofthe first contact. In some such embodiments, the second contact furtherphysically contacts a side surface of the first contact. In some suchembodiments, the second contact extends beyond the first contact tophysically contact the dielectric layer. In some such embodiments, thefirst contact includes a liner and a contact fill disposed within theliner, and the contact fill extends above a topmost surface of theliner.

The foregoing outlines features of several embodiments so that thoseskilled in the art may better understand the aspects of the presentdisclosure. Those skilled in the art should appreciate that they mayreadily use the present disclosure as a basis for designing or modifyingother processes and structures for carrying out the same purposes and/orachieving the same advantages of the embodiments introduced herein.Those skilled in the art should also realize that such equivalentconstructions do not depart from the spirit and scope of the presentdisclosure, and that they may make various changes, substitutions, andalterations herein without departing from the spirit and scope of thepresent disclosure.

What is claimed is:
 1. A device comprising a source/drain featuredisposed on a substrate; a first interlayer dielectric layer disposed onthe substrate, the first interlayer dielectric layer extending to afirst height above the substrate; a first contact feature extendingthrough the first interlayer dielectric layer to electrically couple tothe source/drain feature, the first contact feature extending to asecond height above the substrate, the second height being greater thanthe first height; a dielectric contact liner interfacing with the firstcontact feature and extending from the source/drain feature to the firstheight above the substrate; and a first etch stop layer interfacing withthe first interlayer dielectric layer, the first contact feature and thedielectric contact liner.
 2. The device of claim 1, wherein the contactfeature includes: a conductive fill material; and a contact linerextending along and interfacing with a sidewall of the conductive fillmaterial.
 3. The device of claim 2, wherein the first etch stop layerinterfaces with the sidewall of the conductive fill material, whereinthe first etch stop layer interfaces with a top surface of the contactliner, the top surface of the contact liner facing away from thesubstrate, and wherein the first etch stop layer interfaces with a topsurface of the dielectric contact liner, the top surface of thedielectric contact liner facing away from the substrate.
 4. The deviceof claim 2, further comprising a second contact feature interfacing witha top surface and the sidewall surface of the conductive fill material,the top surface of the conductive fill material facing away from thesubstrate.
 5. The device of claim 2, further comprising a silicidefeature disposed on the source/drain feature, and wherein the contactliner and the dielectric contact liner interface with the silicidefeature.
 6. The device of claim 5, wherein a top surface of the silicidefeature is below a top surface of the source/drain feature.
 7. Thedevice of claim 1, further comprising: a second interlayer dielectriclayer disposed on the substrate, wherein the first interlayer dielectriclayer is disposed on the second interlayer dielectric layer; and a thirdinterlayer dielectric layer disposed directly on the first etch stoplayer, and wherein the contact feature extends continuously through thefirst and second interlayer dielectric layers to the source/drainfeature without extending through the third interlayer dielectric layer.8. The device of claim 1, further comprising: a gate structure disposedon the substrate, wherein the source/drain feature is associated withthe gate structure, and a second etch stop layer disposed on the gatestructure and the source/drain feature and extending to the firstcontact feature, the second etch stop layer interfacing with thesource/drain feature, the first contact feature and the first interlayerdielectric layer.
 9. A device comprising a gate structure disposed on asubstrate, the gate structure including a gate dielectric layer and agate electrode layer; a source/drain feature disposed on the substrateand associated with the gate structure; a first interlayer dielectriclayer disposed on the substrate; a first etch stop layer disposed on thefirst interlayer dielectric layer; and a first contact featureelectrically coupled to the source/drain feature, the first contactfeature including: a conductive fill material at least partiallyembedded within the first etch stop layer and extending to within thesource/drain feature; and a contact liner extending along andinterfacing with a sidewall of the conductive fill material, the contactliner extending within the source/drain feature; and a second contactfeature interfacing with a top surface and the sidewall surface of theconductive fill material, the top surface of the conductive fillmaterial facing away from the substrate.
 10. The device of claim 9,further comprising a dielectric contact liner extending along andinterfacing with a sidewall of the contact liner, the dielectric contactliner extending within the source/drain feature.
 11. The device of claim10, further comprising a third contact feature extending through thefirst interlayer dielectric layer to the gate electrode of the gatestructure, and wherein the third contact feature is free of anydielectric contact liner extending along sidewalls of the third contactfeature.
 12. The device of claim 9, wherein the contact liner extendscontinuously from a bottom surface of the first etch stop layer towithin the source/drain feature such that no portion of the contactliner is embedded within the first etch stop layer.
 13. The device ofclaim 9, further comprising a silicide feature embedded within thesource/drain feature, and wherein the contact liner interfaces with thesilicide feature.
 14. The device of claim 9, further comprising a secondetch stop layer that interfaces with the source/drain feature withoutinterfacing with the first contact feature.
 15. The device of claim 9,wherein the conductive fill material extends to a greater height abovethe substrate than the contact liner.
 16. An integrated circuit devicecomprising: a substrate; an inter-level dielectric disposed on thesubstrate; a first contact extending through the inter-level dielectric,wherein the first contact extends above the inter-level dielectric; asecond contact in physical contact with a top surface of the firstcontact; a source/drain feature disposed on the substrate; an etch stoplayer disposed on the inter-level dielectric, and wherein the firstcontact includes a liner and a contact fill disposed within the liner,the contact fill and the liner extending continuously from the etch stoplayer to within the source/drain feature, and wherein the contact fillincludes opposing sidewall surfaces and the etch stop layer physicallycontacts at least one of the opposing sidewall surfaces of the contactfill.
 17. The integrated circuit device of claim 16, wherein the secondcontact is further in physical contact with a side surface of the firstcontact.
 18. The integrated circuit device of claim 16, wherein thesecond contact extends beyond the first contact to physically contactthe inter-level dielectric.
 19. The integrated circuit device of claim16, wherein the contact fill extends above a topmost surface of theliner.
 20. The integrated circuit device of claim 16, wherein the etchstop layer physically contacts the inter-level dielectric.